Silicon Nanophotonics

The field of silicon nanophotonics has drawn intensive attention in recent years because of the unique advantages, including complementary metal–oxide semiconductor (CMOS) compatibility and the ability to achieve an ultra-high integration density. Various passive and active silicon nanophotonic integrated devices have been developed successfully for diverse applications, including optical fiber telecommunication, data communication, high-performance computing systems, and labs-on-chip. Among the various functional elements, silicon nanophotonic integrated devices for on-chip light manipulation have played very import roles.